发明名称 MULTIPLE WIRE BONDING APPARATUS
摘要 PURPOSE: A multiple wire bonding apparatus is provided to perform a wire bonding process regarding all of the wires of a semiconductor chip within an interval of time that a bonding process for one wire is performed, by simultaneously bonding all of the bonding pads on the semiconductor chip through a multiple capillary. CONSTITUTION: At least one bonding unit has a plurality of capillaries(210) for wire bonding. At least one transfer unit(203,204) transfers the bonding unit in a vertical direction and in a horizontal direction. The bonding unit is installed in a side of the transfer unit. A control unit controls the transfer unit so that the plurality of capillaries are simultaneously positioned in the first and second bonding points, connected to the transfer unit.
申请公布号 KR20020057253(A) 申请公布日期 2002.07.11
申请号 KR20000087547 申请日期 2000.12.30
申请人 HYNIX SEMICONDUCTOR INC. 发明人 SONG, TAE HUI
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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