发明名称 Semiconductor device and method of manufacturing the same
摘要 A semiconductor device comprises a plurality of gate lines composed of line shapes to function as gate electrodes in a plurality of transistors and separated from a substrate by a gate insulating layer, each having an upper metal silicide layer; and a plurality of source/drain regions formed on the substrate between said gate lines solely by carrying out impurity implantation processes.
申请公布号 US2002088976(A1) 申请公布日期 2002.07.11
申请号 US20020041732 申请日期 2002.01.07
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 SHIN YOU-CHEOL;PARK KYU-CHARN;LEE WON-HONG;CHOI JUNG-DAL
分类号 H01L21/28;H01L21/00;H01L21/336;H01L21/4763;H01L21/82;H01L21/8238;H01L21/8247;H01L27/108;H01L27/115;H01L29/04;H01L29/788;H01L29/792;(IPC1-7):H01L29/04 主分类号 H01L21/28
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