AN X-RAY LITHOGRAPHY DEVICE

摘要

The inventive device comprises a soft X-ray source (1), a hemilens (2) in order to transform a divergent radiation of said source into a quasiparallel radiation provided with a large number of channels for transmitting radiatio n using a total external reflection, said channels being directed along elemen ts of a barrel-shaped surface, means for disposing a mask (3) and a substrate ( 4) with a resistor (5) applied thereto. Said substrate and resistor are arrange d on the side of the output end of the hemilenses (2). The device also compris e an absorbent-type filter (6) in order to smooth intensity irregularities of the hemilens output beam. The ratio between cross-sectional dimensions of th e hemilens and the focal distance thereof on the input side is chosen in such a way that the entrance angle of radiation of the source is maintained within the following range: 0.7/ E 1.5 <=.PSI.>= 1.3/e 1.5, where, .PSI. is t he entrance angle of radiation [rad]; E is the radiant energy of the used sourc e [keV]. Material of the reflecting surface of the channels transmitting radiation contains elements having an atomic number equal to or less than 22 , the radiant energy of the source ranging from 0.6 to 6.0 keV.