| 摘要 |
<p>A deposition device (10) capable of depositing a conductive material on the internal surface of a cylindrical base material, comprising a deposition part (20) having a boat part (22) with a groove part for storing the conductive material, a base material support part (30) for supporting the base material (50), a drive part (40) for moving at least one of the deposition part (20) and the base material support part (30) to insert the boat part (22) into the base material (50), and a heating part (42) for heating the boat part (22).</p> |
