FULLERENE COATED COMPONENT OF SEMICONDUCTOR PROCESSING EQUIPMENT,申请号US2001043844-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	FULLERENE COATED COMPONENT OF SEMICONDUCTOR PROCESSING EQUIPMENT
摘要	<p>A corrosion resistant component of semiconductor processing equipment such as a plasma chamber includes a fullerene containing surface and process for manufacturing thereof.</p>
申请公布号	WO2002053797(A1)	申请公布日期	2002.07.11
申请号	US2001043844	申请日期	2001.11.23
申请人		发明人
分类号		主分类号
代理机构		代理人
主权项
地址

您可能感兴趣的专利

A polypeptide comprising the amino acid of an n-terminal choline binding proteina truncate, vaccine derived therefrom and uses thereof

Mammalian tolloid-like gene and protein

Antibody variants and fragments thereof

Human galactosyl transferases

Enzymes responsible for the metabolism of zeatin

Incrementally heated fluid dispenser with non-volatile constituent parts

Test system and method used in testing a mobile communications network infrastructure

Method for tuning a multiple-fuel internal combustion engine and multiple-fuel internal combustion engine

Head rest and restraint assembly

Cam assisted ejection handle for a removable drive carrier

Modulær underbindingsklemmeapplikator

Nye 6,7,8,9-tetrahydro-3H-benz(e)indol-heterocycler med virkning på centralnervesystemet

Fremgangsmåde til fremstilling af polyurinstofbaserede artikler

Apparat til automatisk horisontalindstilling af et køretøjssæde

Røreværksmølle

Peptidylforbindelser og deres terapeutiske anvendelse som inhibitorer af metalloproteaser

Engangsemballage til fremstilling af drikke, især te, samt fremgangsmåde til fremstilling af denne

Inertial vibrationstransducer

Panelformede højttalere

Glassubstrat til refleksion af solenergi og fremgangsmåde til fremstilling deraf