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发明名称
Positioniervorrichtung
摘要
申请公布号
DE69713026(D1)
申请公布日期
2002.07.11
申请号
DE1997613026
申请日期
1997.09.04
申请人
HEWLETT-PACKARD CO. (N.D.GES.D.STAATES DELAWARE), PALO ALTO
发明人
UENO, TOSHIAKI
分类号
G01N37/00;B23Q1/34;B23Q1/62;G01Q10/04;G01Q80/00;G01Q90/00;G05D3/00;G11B5/00;G11B9/00;G11B9/14;H01L21/68;H01L41/09;(IPC1-7):B23Q1/34
主分类号
G01N37/00
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代理人
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地址
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