发明名称 METHOD FOR EVAULATING OF MOLDING MATERIAL WITH DAMS FORMED ON A SEMICONDUCTOR SUBSTRATE TO DEFINE SLITS FOR CAPTURING THE FILLERS CONTAINED IN THE MOLDING MATERIAL
摘要 A test chip for a molding material including fillers, including, a semiconductor substrate and a test circuit formed on the substrate. The test circuit includes at least one transistor, and two dams formed on the substrate for providing a slit therebetween, the slit capturing the fillers of the molding material when the molding material is applied to the test circuit. A method for testing a molding material including fillers for a semiconductor device, including steps of preparing a test chip, placing the test chip in molding equipment, injecting the molding material including fillers into the molding equipment, capturing the fillers in the slit, and detecting the influence of the fillers on electrical characteristics of the test chip using the test circuit
申请公布号 US2002088974(A1) 申请公布日期 2002.07.11
申请号 US20020093801 申请日期 2002.03.11
申请人 TAKAHARA MASARU 发明人 TAKAHARA MASARU
分类号 H01L21/56;G01R31/28;H01L21/66;H01L23/29;H01L23/31;H01L23/544;(IPC1-7):H01L23/58 主分类号 H01L21/56
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