发明名称 |
Hardware configuration for parallel data processing without cross communication |
摘要 |
A method and apparatus for parallel processing of data without the need for cross-communication or synchronization between processing nodes is provided. The system is especially suitable for use in a wafer inspection system for the semiconductor industry. Embodiments include scanning a small area of the wafer, and distributing pixel data among a plurality of processing nodes, each of which accept and process an optimal amount of pixel data independently of the other processing nodes, thereby enabling increased throughput without increasing system complexity.
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申请公布号 |
US2002090128(A1) |
申请公布日期 |
2002.07.11 |
申请号 |
US20000726597 |
申请日期 |
2000.12.01 |
申请人 |
NAFTALI RON;RUBINOVICH VITALY |
发明人 |
NAFTALI RON;RUBINOVICH VITALY |
分类号 |
G01B11/30;G01N21/95;G01N21/956;G01V8/00;G06F15/80;G06K9/00;H01L21/66;(IPC1-7):G06K9/00 |
主分类号 |
G01B11/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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