发明名称 Hardware configuration for parallel data processing without cross communication
摘要 A method and apparatus for parallel processing of data without the need for cross-communication or synchronization between processing nodes is provided. The system is especially suitable for use in a wafer inspection system for the semiconductor industry. Embodiments include scanning a small area of the wafer, and distributing pixel data among a plurality of processing nodes, each of which accept and process an optimal amount of pixel data independently of the other processing nodes, thereby enabling increased throughput without increasing system complexity.
申请公布号 US2002090128(A1) 申请公布日期 2002.07.11
申请号 US20000726597 申请日期 2000.12.01
申请人 NAFTALI RON;RUBINOVICH VITALY 发明人 NAFTALI RON;RUBINOVICH VITALY
分类号 G01B11/30;G01N21/95;G01N21/956;G01V8/00;G06F15/80;G06K9/00;H01L21/66;(IPC1-7):G06K9/00 主分类号 G01B11/30
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