发明名称 METHOD FOR FABRICATING COMPLEMENTARY METAL OXIDE SEMICONDUCTOR IMAGE SENSOR
摘要 PURPOSE: A method for fabricating a complementary metal oxide semiconductor(MOS) image sensor is provided to decrease spin on glass(SOG) defects, by making hydrophilic SOG intercept a contact with a color filter array(CFA), a micro lens or deionized water of an assembly process. CONSTITUTION: A metal interconnection is additionally patterned on an interface between a product die and a scribe line so that a high topology is formed in the region where the metal interconnection is additionally patterned. An SOG layer(205) is not exposed when an etch process is performed regarding the interface between the product die and the scribe line.
申请公布号 KR20020057276(A) 申请公布日期 2002.07.11
申请号 KR20000087579 申请日期 2000.12.30
申请人 HYNIX SEMICONDUCTOR INC. 发明人 HWANG, JUN
分类号 H01L27/146;(IPC1-7):H01L27/146 主分类号 H01L27/146
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