Optical test system for testing integrated circuits via optical coupling uses a device under test to hold an optical fibre in optical alignment by applying an alignment holder

摘要

An optical system has an optical fibre (44), an alignment holder (60) and a focussing element (48). Openings/channels (62) fit in the alignment holder mounted on an integrated circuit in order to hold the optical system. The alignment holder acts as a heat sink. Light sensitive elements on the integrated circuit are triggered with light focussed on each of these elements at a target point. Independent claims are also included for: (1) a method for testing a device under test; (2) an electrical semiconductor product.