发明名称 Removal of impurities and improvement of minority carriers life-time in silicon
摘要 <p>A method of increasing the minority carrier recombination lifetime in a silicon body contaminated with transition metals, in particular iron. The silicon body is stored at a temperature and for a time which are adequate to bring about a diffusion of the metal out of the interior of the silicon body to its surface and increase the minority carrier recombination lifetime measurably.</p>
申请公布号 EP0590508(B1) 申请公布日期 2002.07.10
申请号 EP19930115307 申请日期 1993.09.23
申请人 MEMC ELECTRONIC MATERIALS, INC. 发明人 FALSTER, ROBERT
分类号 H01L21/322;H01L21/324;(IPC1-7):H01L21/322 主分类号 H01L21/322
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