| 摘要 |
PURPOSE: An adhesion chamber is provided to prevent the inner space of the chamber from being contaminated due to impurities dropping through an exhaust hole having a vertical structure. CONSTITUTION: An adhesion chamber includes a plate(94), a chamber(60), reaction gas injection holes(76,80,84,86), and exhaust holes(62,68). An object(90) is mounted on the plate. The chamber is vertically moved above the plate and has a horizontal plane and sides. The sides of the chamber closely adhere to the edge of the plate to tightly close the space between the horizontal plane and the plate. The reaction gas injection holes are placed in the horizontal plane of the chamber. Reaction gases to be reacted with the object are injected through the injection holes. The exhaust holes discharge gases inside the chamber when the sides of the chamber closely adheres to the plate and discharges gases obtained after the reaction gases reacted with the object.
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