| 发明名称 |
ABRASIVE PAD |
| 摘要 |
PROBLEM TO BE SOLVED: To provide an abrasive pad that can stabilize a polishing rate and maintain uniformity and flatness. SOLUTION: The abrasive pad having surface machined to retain abrasive has a variation in thickness of 100 μm or smaller. |
| 申请公布号 |
JP2002192455(A) |
申请公布日期 |
2002.07.10 |
| 申请号 |
JP20000393215 |
申请日期 |
2000.12.25 |
| 申请人 |
TOYOBO CO LTD;TOYO TIRE & RUBBER CO LTD |
发明人 |
KOMAI SHIGERU;SHIMOMURA TETSUO;NAKAMORI MASAHIKO;SEYANAGI HIROSHI;OGAWA KAZUYUKI |
| 分类号 |
B24B37/20;B24B37/24;B24B37/26;H01L21/304 |
主分类号 |
B24B37/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
