| 摘要 |
PROBLEM TO BE SOLVED: To precisely, easily and quickly measure the curvature radius of any material having a spherical surface such as liquid material, solid material, transparent material, or opaque material or the like regardless of the material in no contact with high reproducibility by use of a simple facility. SOLUTION: In this method and device, paying attention to the occurrence of the phenomenon that, when light L1 converged toward the curvature center O of the spherical surface 2 by an objective lens 1 as a condensing optical system is reflected by the surface of the spherical surface, the reflected light L2 thereof advances reversely in the same route as the incident light L1, and the occurrence of the phenomenon that an incident light L1' converged to a point P on the surface of the spherical surface 2 by the objective lens having an optical axis A passing the center O of the spherical surface 2 is also reflected by the point P to form a light L2' advancing reversely in the same route as L1', the position information for the condensing points of the both is obtained by observing both the phenomena to determine the distance of both the positions, and the distance is determined as the curvature radius r of the spherical surface.
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