发明名称 METHOD FOR MANUFACTURING ELECTRONIC COMPONENT
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing electronic components, which does not cause discoloration due to foreign materials on the surface of a metal sheet, after peeling a resist film, in the method for manufacturing the electronic components by etching the metal sheet, with a photoetching method using the resist film as a mask. SOLUTION: The manufacturing method is characterized by repeatedly using a peeling liquid (7) several times, and controlling a quantity of all Cr in the peeling liquid (7) to be 50 mg/l or less, in the method for manufacturing the electronic components comprising steps of; applying photopolymer on at least one side of a metal sheet (1), and forming the photopolymer layer (2a, 2b); forming a resist film (3a, 3b) having several openings through which the surface of the metal sheet is exposed, according to a predetermined pattern, on at least one side of the metal sheet (1), by subjecting the photopolymer layer (2a, 2b) to a pattern exposure/development process; etching the metal sheet (1) by using the resist film (3a, 3b) as the mask; and peeling the resist film (3a, 3b) by contacting the peeling liquid (7).
申请公布号 JP2002194570(A) 申请公布日期 2002.07.10
申请号 JP20000393204 申请日期 2000.12.25
申请人 TOSHIBA CORP 发明人 ICHIKAWA KATSUMI;KOIKE NORIO
分类号 G03F7/40;C23F1/00;G03F7/42;H01J9/14;(IPC1-7):C23F1/00 主分类号 G03F7/40
代理机构 代理人
主权项
地址