| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for cleaning of glass substrate without exerting a bending load on a glass substrate for improving the yield of products and prevention of troubles in latter processes. SOLUTION: In the apparatus for cleaning the edge 6a of a display panel 6 with a wiper tape 10, a chuck mechanism 9, which is used for opening and closing a pair of pressing members 8A and 8B for pressing the wiper tape 10 to the edge 6a, is elastically held by a flat spring 13, and when the chuck mechanism 9 is replaced from the original height position in the upper and lower directions, a restoring force is made to act to restore the replacement. In this constitution, the edge 6 is put between the pressing members 8a and 8b at the center with uniform load and exertion of bending load on the display panel 6 is prevented.
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