| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor expanding the range of linearity representing a relationship where the electrostatic capacity is linearly dependent on the pressure in comparison with conventional ones. SOLUTION: The pressure sensor 10 includes an electrode 4 disposed on a substrate 2, a dielectric film 5 disposed so as to cover the electrode, and a diaphragm having at least a conductive surface and being disposed on the dielectric film so as to be opposed to the electrode and to form a clearance 8. When the diaphragm is pressurized, the change of an area in contact with the dielectric film is detected, and the pressure is measured. The electrode is formed so that the size of length gradually increases from the center to the end of the width.
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