| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding device that can grind a workpiece to a uniform thickness. SOLUTION: The grinding device comprises a rotatably constructed chuck table 33 having a suction holding surface 351 on which the sheetlike workpiece W is placed, a spindle unit having a rotary shaft arranged parallel to the suction holding surface 351 of the chuck table 33, and a disklike grinding wheel 54 mounted on the rotary shaft 53 of the spindle unit. The suction holding surface 351 of the chuck table is formed into a cone with the vertex on the rotational axis, and the grinding wheel is relatively moved parallel to the suction holding surface in a grinding region.
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