| 发明名称 |
METHOD FOR PRODUCING HIGHLY PURE, GRANULAR SILICONE AT LOW PRESSURE |
| 摘要 |
<p>The invention relates to a method for producing highly pure, granular silicone by decomposing a gas containing silicone, especially a silane, in a pressure range of 100 to 900 mbar. Up to 50 vol. % of a silicone-free gas can be added, in relation to the quantity of gas supplied overall.</p> |
| 申请公布号 |
EP1220816(A1) |
申请公布日期 |
2002.07.10 |
| 申请号 |
EP20000966081 |
申请日期 |
2000.09.28 |
| 申请人 |
SOLARWORLD AKTIENGESELLSCHAFT |
发明人 |
MLECZKO, LESLAW;HEROLD, HEIKO;BUCHHOLZ, SIGURD |
| 分类号 |
C01B33/035;C01B33/027;C01B33/029;H01L31/04;H01L31/18;(IPC1-7):C01B33/027 |
主分类号 |
C01B33/035 |
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