发明名称 |
CERIUM-BASED ABRASIVE PARTICLE POWDER HAVING EXCELLENT PARTICLE SIZE DISTRIBUTION, SLURRY OF ABRASIVE CONTAINING THE PARTICLE POWDER AND METHOD FOR PRODUCING THE PARTICLE POWDER |
摘要 |
<p>PROBLEM TO BE SOLVED: To obtain an abrasive particle powder maintaining a sufficient polishing rate and having an excellent polished surface and improving washing properties of the abrasive particle powder remaining after polishing in polishing using a cerium-based abrasive particle powder. SOLUTION: This abrasive particle powder comprises a cerium-based abrasive particle powder containing a cerium oxide in an amount of 30-80 wt.% based on rare earth oxides and satisfies the following formulae (1) and (2) when 10%, 50% and 90% particle diameters (μm) from the small particle diameter side are d10, d50 and d90 respectively in cumulative particle size distribution of particle size distribution measurement of the particle powder. 0.1<=d50<=3 (1) d90/d10<=15 (2).</p> |
申请公布号 |
JP2002194334(A) |
申请公布日期 |
2002.07.10 |
申请号 |
JP20000396533 |
申请日期 |
2000.12.27 |
申请人 |
MITSUI MINING & SMELTING CO LTD |
发明人 |
ITO AKIFUMI;MOCHIZUKI NAOYOSHI;KUWABARA SHIGERU;WATANABE HIROYUKI |
分类号 |
B24B37/00;C09K3/14;H01L21/304;(IPC1-7):C09K3/14 |
主分类号 |
B24B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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