| 摘要 |
PROBLEM TO BE SOLVED: To provide vacuum deposition equipment which prevents a drop of vapor deposited article onto a rail member and prevents efficiency drop for treating the article. SOLUTION: The vacuum deposition equipment 1 is characterized in that the upper part of a guide rail 6 which guides a movement of a dome 5, while keeping away from a supporting section of a dome 5 for fixing a glass substrate 4, is covered with a guard member 9. Therefore, the upper part does not fall on a guide rail 6, and does not prevent rotation/revolution of a dome 5, even when a glass substrate 4 is detached from a dome 5, by vibration which may occur during operation of the equipment. Thereby, the equipment is controlled so as not to reduce treatment efficiency. In addition, there is no fear that, for instance, the dome 5 pushes and deforms the holding stick 8 for a correction plate, and consequently damages the holding stick, because the vacuum deposition equipment 1 can substantially prevent a driving mechanism from restricting the dome 5.
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