| 摘要 |
PROBLEM TO BE SOLVED: To provide a scroll pump which impacts back pressure corresponding to a change in after-loading of a pump to a movable scroll with a simple struc ture. SOLUTION: This scroll pump, having a stationary scroll 1 and a movable scroll 2 with spiral laps 1d, 2b erected on a surface facing respective end plates 1c, 2a, has a gas sealing chamber 52 for introducing discharged gas into the back surface of the movable scroll 2 as a back-pressure imparting means for imparting back pressure for pressing the scroll 2 against the stationary scroll 1, and a seal 7 for sealing the introduced gas. The seal 7 is provided with a flexure for transferring back pressure. The preferable cross-section shape of the seal 7 is of lip type.
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