| 摘要 |
An interferometer system comprises a source (13b) for emitting a beam of radiation of short coherence length, a device (89b, 91b) for splitting the beam into two partial beams and for subsequent superposition of the partial beams, and a beam transmitting means (105b) for directing the superimposed partial beams to two reflecting structures (3b, 5b), one of which (3b) is partially transmissive and can be provided by the transmitting means itself. A detector (129) receives the radiation reflected back from the two structures for determining the distance (d2) between them. The optical path length difference (d1) of the splitting device (89b, 91b) and the distance (d2) between the structures are greater than the coherence length of the source, but are similar so that reflected wavepackets are able to interfere. A beam splitting means (111) may be provided to split the partial beams into further partial beams that are superimposed to form an interference pattern on a line detector (129).
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