| 摘要 |
PROBLEM TO BE SOLVED: To obtain a cleaning apparatus which reduces cleaning treatment costs and prevents the re-adhesion of ionic substances to a material to be cleaned. SOLUTION: The material 7 to be cleaned, the first electrode 3, and the second electrode 4 are immersed in a cleaning solution 8, and an ion exchangeable material 2 is set between the first electrode 3 and the second electrode 4. When voltage is applied between the first electrode 3 and the second electrode 4 by a power source 6, cations and anions produced by the ionization of a residual chemical liquid are electrophoresed to the first electrode (anode) and the second electrode (cathode) and caught by the ion exchangeable material 2 to be removed.
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