| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film specimen and a method for producing the thin film specimen capable of faithfully observing the structure of a laminated film formed on a plastic substrate with high-resolution using a transmission electron microscope, and carrying out a good evaluation process for analyzing and measuring the thickness of film. SOLUTION: The thin film specimen is used for evaluating a cross-sectional structure of the laminated film of an object that is composed of the plastic substrate and the laminated film formed on the plastic substrate. The thin film specimen is composed of a worked object obtained by removing at least a portion of the plastic substrate supporting the laminated film of the object, and a first support body and a second support body by which the worked object is held and sandwiched through an adhesive layer. The thin film specimen can be made thinner by an arbitrary means.
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