CONTACT HOLE PRODUCTION BY MEANS OF CROSSING SUDDEN PHASE SHIFT EDGES OF A SINGLE PHASE MASK,申请号EP19990955723-传众专利搜索

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发明名称	CONTACT HOLE PRODUCTION BY MEANS OF CROSSING SUDDEN PHASE SHIFT EDGES OF A SINGLE PHASE MASK
摘要
申请公布号	EP1221072(A1)	申请公布日期	2002.07.10
申请号	EP19990955723	申请日期	1999.09.17
申请人	INFINEON TECHNOLOGIES AG	发明人	GRASSMANN, ANDREAS;FRIEDRICH, CHRISTOPH;GRIESINGER, UWE;PFORR, RAINER;WIDMANN, DIETRICH
分类号	G03F1/00;G03F7/20;(IPC1-7):G03F1/00	主分类号	G03F1/00
代理机构		代理人
主权项
地址

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