| 摘要 |
PROBLEM TO BE SOLVED: To enhance cleanliness in a clean space easily at a low cost using a simple structure. SOLUTION: Air supply surface of an outlet surface filter 16e is curved substantially radially, at least along the widthwise direction orthogonal to the depthwise direction, so that downward flow clean air 11 being supplied from an air supply section 16c is supplied while being spread substantially radially, at least in the widthwise direction. Since the downward flow clean air 11 being supplied from the air supply surface of the outlet surface filter 16e can be supplied properly at least over the entire width of a clean space 12, a uniform downward flow can be obtained. |
