发明名称 An electroplating process
摘要 A method and circuit (14) for monitoring an electroplating operation of an electroplating apparatus (10) of the type having a first electroplating cell (18) for depositing nickel onto an integrated circuit leadframe (12) and a second electroplating cell (19) for subsequently depositing palladium onto the leadframe (12). A first current (30) is applied in the first electroplating cell (18) to form a nickel deposit on the leadframe (12) and a second current (31) is applied in the second electroplating cell (19) to from a palladium deposit on the nickel deposit. The second current (31) is greater than the first current (30) if the electroplating apparatus (10) is operating normally. The first current (30) and second current (31) are compared in a comparator (44) during the electroplating operation, and if the second current (31) is less than the first current (30), an error signal is generated on an output line (50). If desired, the electroplating apparatus (10) may be stopped in response to the error signal. <IMAGE>
申请公布号 EP0834604(B1) 申请公布日期 2002.07.10
申请号 EP19970116072 申请日期 1997.09.16
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 DREW, PAUL R.;MOELHLE, PAUL R.
分类号 C25D7/00;C25D7/06;C25D21/12;H01L23/495 主分类号 C25D7/00
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