| 摘要 |
<p>A magneto resistive sensor (62) having a GMR magnetic laminated film is disclosed. The GMR magnetic laminated film (12a, 12b, 12c, 12d) comprises a plurality of magnetic thin layers (3) having a NiCoFeB composition alternately laminated with nonmagnetic thin layers (4) such as copper layers. Since the magnetic thin layers contain B in their composition, the GMR magnetic laminated film (12a, 12b, 12c, 12d) can stand in magneto resistance ratio ( DELTA R/R %) under a high temperature of up to 250 degrees centigrade. By the reason, electric wiring can be connected by a lead-free solder to assemble a magnetic resistive sensor for a magnetic rotary encoder (61). The thermal resistance variation and the magneto resistance ratio are further improved when a NiFeCr underlayer is used under the GMR magnetic laminated film. <IMAGE></p> |
