发明名称 ATOMIC BEAM CONTROLLER, AND CONTROL METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To automatically control a position of an atomic beam, and to move a drawing position two-dimensionally, in an atomic beam controller and a control method wherein the atomic beam passing through a multipolar magnetic field is irradiated with a light beam to control the position of the atomic beam. SOLUTION: This atomic beam controller wherein the atomic beam passing through the multipolar magnetic field is irradiated with the light beam to control the position of the atomic beam is provided with a probe light generator for generating probe light for detecting the position of the atomic beam, a photodetector for receiving the probe light, and a current control part for controlling a current flowing in a multipolar magnetic field generating electrode for controlling the position of the atomic beam based on an output value of the photodetector.
申请公布号 JP2002196100(A) 申请公布日期 2002.07.10
申请号 JP20000398289 申请日期 2000.12.27
申请人 COMMUNICATION RESEARCH LABORATORY 发明人 OMUKAI RYUZO;WATANABE MASAYOSHI
分类号 G21K1/00;B01D59/34;G21K1/093;G21K5/04;H01L21/027;H01L21/30;H05H3/04;(IPC1-7):G21K1/00 主分类号 G21K1/00
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