发明名称 Method for the sulphidation treatment of 111-V compound semiconductor surfaces
摘要 <p>Method for deoxidizing and passivating, by sulfidation, a surface of a III-V compound semiconductor material undergo strong oxidation in the presence of oxygen, wherein the surface to be passivated is immersed in a dilute aqueous solution containing sulfide ions with a concentration of between about 10-1M and 10-7M.</p>
申请公布号 GB0212300(D0) 申请公布日期 2002.07.10
申请号 GB20020012300 申请日期 2002.05.28
申请人 SAGEM SA;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (C N R S) 发明人
分类号 H01L21/306;H01L31/18 主分类号 H01L21/306
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