| 摘要 |
PURPOSE: A cleaning apparatus is provided to improve the capacity of eliminating contaminated particles by using a roll brush having a cavity, and to remarkably increase cleaning capacity by installing a cavitation jet unit inside the roll brush. CONSTITUTION: A brush unit has a plurality of cavities(16). A supply pipe(13) supplies cleaning water, connected to the brush unit. The roll brush(12) includes the brush unit and the supply pipe. The roll brush includes the brush unit and the supply pipe. The cleaning apparatus has the roll brush, a drive motor and a roller. At least one roll brush is installed in the upper and lower portion of a substrate to clean. The drive motor rotates the roll brush, connected to the roll brush. The roller transfers the substrate.
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