METHOD OF SECURING ETCHING PROCESS MARGIN IN LIQUID CRYSTAL DISPLAY PANEL

摘要

PURPOSE: A method of securing etching process margin in a liquid crystal display panel is provided to form a data line or a gate of the liquid crystal display panel using CO/Al/CO films to improve etching margin and etching yield when a via hole is etched. CONSTITUTION: CO/Al/CO films are laminated as a gate electrode layer(4) on a glass substrate(2) and patterned through photolithography. A gate insulating layer, a data line, and a pixel electrode are formed on the CO/Al/CO films. Since the CO/Al/CO films are used as the gate electrode layer, etch selectivity of the gate insulating layer and the gate electrode is secured when a via hole(12) is dry-etched.