Semiconductor wafer with sensors for detecting radiation on the semiconductor wafer

摘要

A semiconductor wafer includes a plurality of sensors. Each of the sensors has a field oxide transistor, and a detecting circuit electrically connected to the field oxide transistor for detecting if the field oxide transistor is switched on or off and generating corresponding detecting signals. The field oxide of a different field oxide transistor has a different thickness. Each field oxide transistor is coupled to a corresponding detecting circuit for detecting radiation impinging on the semiconductor wafer.