发明名称 |
Cantilever for use in a scanning probe microscope |
摘要 |
A cantilever for use in a scanning probe microscope includes a lever portion having a probe portion made from a semiconductor substrate. The length and thickness directions of the lever portion are parallel to a top surface of the semiconductor substrate, and a width direction of the lever portion corresponds to a thickness direction of the semiconductor substrate. The probe portion is triangular or substantially triangular pyramid shaped having three faces, two of which are made of crystal and a remaining one of which is formed by an artificial process.
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申请公布号 |
US6415653(B1) |
申请公布日期 |
2002.07.09 |
申请号 |
US19990273216 |
申请日期 |
1999.03.19 |
申请人 |
OLYMPUS OPTICAL CO., LTD. |
发明人 |
MATSUYAMA KATSUHIRO |
分类号 |
B81B3/00;B81C1/00;G01Q70/10;G01Q70/14;G01Q70/16;(IPC1-7):G01B5/28;H01L21/465 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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