Near-field optical heterodyne measurement system using near-field fiber-optic probe

摘要

A near-field optical heterodyne measurement system for measuring characteristic of high-frequency and high-speed devices includes a combining unit for combining two optical beams to produce a submicron-size optical beam, wherein the two optical beams have different frequency from each other, a near-field fiber-optic probe for injecting the submicron-size optical beam into a sample device to be measured, a position controlling unit for controlling a position of the near-field fiber-optic probe, and a measuring unit for receiving a millimeter wave exited from the sample device to measure characteristics of the sample device.