PISTON OF HYDRAULIC GENERATOR AND PRODUCTION METHOD THEREOF

摘要

PURPOSE: A piston and its production method are provided to improve the efficiency of hydraulic generator and to extend the operating time by giving the lubricating ability and the abrasion resistance to the surface of the piston. CONSTITUTION: A sputter is washed with 200-1000V in an argon atmosphere of 50-100mTorr. An intermediate layer(90) is layered with 300-600V in an argon and silane mixed atmosphere of 100-300mTorr. A diamond-like carbon film(80) is coated on the piston in 1-10micrometers with 200-500mTorr and 300-600V by inducing hydrocarbon gas from a gas supply system. Thereby, the efficiency of a hydraulic generator is improved and the operating life length is extended.