VERTICAL CAVITY SURFACE EMITTING LASER HAVING THICK INNER RESONANCE CONTACT LAYER AND CURRENT MIRROR FOR ION INJECTION, AND METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: A vertical cavity surface emitting laser and a method of manufacturing the same are provided to minimize a generation of heat and to maximize a discharge of heat, which has a long wavelength and a thick inner resonance contact layer capable of realizing a current injection structure. CONSTITUTION: A lower mirror layer(5) is grown on a semiconductor substrate(6). An ion injection layer(8) is formed on a top of the lower mirror layer(5). An activated layer(3) is coated over the ion injection layer(8) of the mirror layer(5). An inner resonance contact layer(10) is covered on the activated layer(3). An undoped upper mirror layer(9) is formed on the inner resonance contact layer(10). The inner resonance contact layer(10) has a thermal conductivity of at least five times than that of the upper mirror layer(9) and a thickness of 0.7 times than that of the activated layer(3). An electrode(1) is coated on the upper mirror layer(9).