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摘要
申请公布号
JP2002520830(A)
申请公布日期
2002.07.09
申请号
JP20000559040
申请日期
1999.07.09
申请人
发明人
分类号
B25J15/00;B25J15/06;B65G49/06;B65G49/07;H01L21/00;H01L21/67;H01L21/673;H01L21/677;(IPC1-7):H01L21/68
主分类号
B25J15/00
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代理人
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