Method and apparatus for examining test pieces

摘要

A measurement system is used in particular to detect defects in test objects. To that end, the test object is lighted from a lighting unit that includes a plurality of laser diodes. The beam cones of the individual laser diodes generate a common lighting spot on the test object. The object being measured is observed interferometrically, where the interferometer is part of a measurement head. An electronic pattern sensor detects interference patterns generated by the interferometer.