发明名称 Keepers for MRAM electrodes
摘要 A magnetic memory device, preferably a magnetic random access memory (MRAM) and method for forming same are described wherein a bit region sensitive to magnetic fields and preferably comprising a tunneling magnetoresistance (TMR) structure is located between a top electrode with a magnetic keeper and a bottom electrode with a magnetic keeper. The top electrode is preferably made of copper using a damascene process. The magnetic keeper of the top electrode includes at least a magnetic material layer (e.g., Co-Fe) but in the illustrated embodiments also includes one or more barrier layer (e.g., Ta). Various embodiments describe structures wherein the magnetic keeper stack is in contact with one, two or three surfaces of the top electrode, which face outward from the device.
申请公布号 US6417561(B1) 申请公布日期 2002.07.09
申请号 US20010916884 申请日期 2001.07.27
申请人 MICRON TECHNOLOGY, INC. 发明人 TUTTLE MARK E.
分类号 H01L27/105;H01L21/8246;H01L27/22;H01L43/08;(IPC1-7):H01L23/552 主分类号 H01L27/105
代理机构 代理人
主权项
地址