Angular velocity sensor

摘要

An angular velocity sensor according to an embodiment of the present invention includes: a supporting substrate; a support-fixing portion disposed in the supporting substrate; a first supporting beam connected to the support-fixing portion; a first oscillator supported with the first supporting beam; a second supporting beam connected to the first oscillator; a second oscillator supported with the second supporting beam oscillating in the direction that a Coriolis force is generated; driving electrodes for driving the first oscillator and the second oscillator in a predetermined direction; and detecting electrodes for detecting the displacement of the second oscillator caused by the Coriolis force applied to the second oscillator, wherein the first supporting beam extends at least in the direction orthogonal to the oscillating direction of the first oscillator, both ends of the first supporting beam being connected to the first oscillator, and a longitudinally intermediate portion of the first supporting beam being joined to the support-fixing portion.