METHOD AND SYSTEM OF DISINFECTION USING LOW FREQUENCY PLASMA

摘要

PROBLEM TO BE SOLVED: To reduce the quantity of reactive chemicals remaining in a disinfected article and to simplify the structure of an disinfection device. SOLUTION: A method and a system of disinfection utilizing the low frequency gas discharge are provided. The method of disinfection comprises disposing an article in a vacuum room 12 and reducing the pressure in the vacuum room to a prescribed pressure value. Chemical species of gas or vapor are introduced into the vacuum room 12, and the low frequency plasma with the frequency of 0-200 kHz is generated inside the vacuum room 12. The low frequency plasma is sustained for a period of time sufficient for removing almost all the chemical species of gas or vapor from the article.