| 摘要 |
A particle size analyzer based on laser diffraction method is formed of an irradiation optical system for irradiating laser beam to particles, a measurement optical system for measuring a space intensity distribution by receiving light diffracted/scattered by the particles of the laser beam from the irradiation optical system, and an operation portion for obtaining a particle size distribution of the particles from the results measured by the measurement optical system. The irradiation optical system has a semiconductor laser in an output beam wavelength of 300 to 500 nm as a light source. Thus, particles having diameters of the order of sub-microns can be measured.
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