| 摘要 |
A vacuum pipe for a part which is mounted so as to be movable and projects from outside a vacuum chamber into a vacuum in the vacuum chamber, comprises an opening in a wall of the vacuum chamber limiting the vacuum, with an inner side facing the vacuum and an outer side at which is provided an annular sealing surface surrounding the opening, an annular sealing surface at the part projecting through the opening into the vacuum from outside the vacuum, a sealing arrangement which is provided between the annular sealing surfaces of the wall and of the part and which comprises at least one sealing ring of elastic material, and a guide device which guides the part relative to the wall and by which at least a minimum axial pressing force is maintained on the at least one sealing ring in every position of the part, resulting in a deformation of the at least one sealing ring such that tightness is ensured, wherein the deformation of the sealing ring changes at least in areas of the sealing ring when the part moves relative to the wall.
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