| 摘要 |
<p>PURPOSE:To prevent the undesirable oxidation and other decomposition of objects to be treated in carriers during the storage of the carriers. CONSTITUTION:A carrier housing chamber 18A is enclosed by plates on its top, bottom, both lateral, and rear sides with plates and is composed of a housing chamber main body 150 opened on the front side and a platy door 152 which opens or closes the front face of the chamber 150 as required. An inert gas supplying tube 170 and exhaust tube 172 are connected to the chamber 150 and the tubes 170 and 172 are respectively provided with opening/closing valves 174 and 176. The opening and closing of the valves 174 and 176 are controlled from a stocker control section 178. In addition an O2 concentration sensor 180 is provided for measuring the O2 concentration in the chamber 18A. The O2 concentration value of each chamber 18A measured by means of the sensor 180 is supplied to the section 178.</p> |
