| 摘要 |
PURPOSE: A guide pin of a rotatory drying apparatus is provided to prevent a substrate from being broken in unloading the substrate, by making the upper circumference of a fixing bolt of the guide pin for fixing the substrate smaller than the outer diameter of a guide unit. CONSTITUTION: A rotor rotates a cleaned substrate. A substrate supporting plate supports the cleaned substrate, positioned on the rotor. The guide pin fixes the cleaned substrate at the side of the cleaned substrate. The guide unit(130) comes in contact with the side surface of the substrate. A hole is formed inside the guide unit. A support unit(110) is positioned under the guide unit. The fixing bolt(140) fixes the guide unit and the support unit. The circumference of the first portion in the upper part of the fixing bolt is smaller than that of the guide unit, and the second portion in the intermediate part of the fixing bolt is positioned in the hole of the guide unit.
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