APPARATUS FOR DISPLAYING EXHAUST STATE OF SEMICONDUCTOR FABRICATING EQUIPMENT

摘要

PURPOSE: An apparatus for displaying the exhaust state of semiconductor fabricating equipment is provided to make an operator easily recognize whether reaction gas is exhausted, by protruding a light emitting device to the outside of a housing. CONSTITUTION: A predetermined position of an exhaust pipe(10) is divided to connect the housing(20) to a coupling unit(21). The light emitting device(31) protrudes to the outer surface of the housing. Connection terminals are installed on the inner surface of the housing, confronting each other and electrically connected to the light emitting device. A display unit has the light emitting device and the connection terminals. A detecting unit has a detection plate(41) for turning on/off the light emitting device. The detection plate hinges on the inside of the housing. One side(41a) of the detection plate is supported by an elastic unit(42) to have tension force in a direction that the reaction gas is induced. The other side(41b) of the detection plate is rotated by the induced reaction gas with respect to a hinge(H), positioned between the connection terminals.