| 发明名称 |
Mems-switched stepped variable capacitor and method of making game |
| 摘要 |
<p>The present invention relates to a stepped micro electromechanical structure (MEMS) capacitor that is actuated by a plurality of MEMS switches. The MEMS switches may be within the stepped capacitor circuit, or they may be actuated by an independent circuit. The stepped capacitor may also be varied with intermediate steps of capacitance by providing at least one variable capacitor in the stepped MEMS capacitor structure.</p> |
| 申请公布号 |
AU2002217909(A1) |
申请公布日期 |
2002.07.08 |
| 申请号 |
AU20020217909 |
申请日期 |
2001.11.26 |
| 申请人 |
INTEL CORPORATION |
发明人 |
VALLURI R. RAO;QING MA;PENG CHENG |
| 分类号 |
H01G5/38;B81B3/00;H01G5/00;H01G5/16;(IPC1-7):H01G5/16;H01L21/20 |
主分类号 |
H01G5/38 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
