METHOD OF INSPECTING MASTER DISK FOR MAGNETIC RECORDING MEDIUM

摘要

PURPOSE: To strictly and efficiently inspect the defects of ferromagnetic thin film layers of a master disk for magnetic recording media. CONSTITUTION: This method includes a process step (a) of forming an indices 16 for alignment on a circumference concentric at plural parts with an information recording section simultaneously with formation of the information recording section to the master disk 10, a process step (b) of previously preparing non-defective article information 60 indicating the shape patterns of the non- defective articles of the information recording section, a process step (c) of acquiring the images of the information recording section and the indices 16 of the master disk 10 from an image acquiring section 30 or the like and a process step (d) of inspecting the shape patterns of the information recording section by comparing the images of the information recording section and the non-defective article information 60 after aligning the images of the information recording section with the non-defective article information 60 based on the images of the indices 16 by using a computer, etc.